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The unit does not have a controller cover and there are no end effectors installed
Removed from a TEL Tokyo Electron Telius 300mm Etcher System This is used working surplus
Inventory # A-8643
Daughterboard 1 Part No: 0100-00580
Aera PI-98 Mass Flow Controller MFC AMAT 0190-34218 Reseller Lot of 12 Working The unit does not haveAera PI 98 Mass Flow Controller MFC AMAT 0190 34218 Reseller Lot of 12 Working Model No: PI 98 Connector: DeviceNet Fitting: Surface Mount Reseller Lot of 12 May Require Calibration Included Components Part No: 0190 34218, N2 (Qty. 6) Part No: 0190 34218, Nh3 (Qty. 5) Part No: 0190 34220, N2 ThisAera PI 98 Mass Flow Controller MFC AMAT 0190 34218 Reseller Lot of 12 is used working surplus. The physical condition is good, but there are signs of
US$ 495.60
US$ 108.86
US$ 910.00
US$ 179.97